Comment svgcoat SNF 2008-06-09 08:05:13: cleaned catch cup and dummy wafers
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Jun 9 08:05:14 PDT 2008
I found a lot of excess resist all over the exhaust system under the catch cup and also on the secondary container maybe
someone was manual dispense using too much resist on
the track , cleaned catch cup dummy wafers , secondary
'container, replaced dirty alumminun foil that covers the
secondary container cleaned the belts.
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