Problem svgcoat SNF 2008-06-10 11:24:31: big resist leak

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jun 10 12:04:18 PDT 2008


Could not find leak. Replaced the foil in secondary containment. Tested track operation-All OK. Suspect that pool of resist may have been from 3" wafer processing. Will investigate. Track OK to use.




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