Shutdown svgcoat SNF 2008-06-10 11:26:03: big leak

gsosa at gsosa at
Tue Jun 10 12:04:26 PDT 2008

Could not find leak. Replaced the foil in secondary containment. Tested track operation-All OK. Suspect that pool of resist may have been from 3" wafer processing. Will investigate. Track OK to use.

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