Problem svgcoat SNF 2008-06-16 10:53:25: poor spin

[vilanova at snf.stanford.edu]

completed PM to scg coat  tool, I cleaned the , filter for the SC~VG recovery resist pump system ,catch cup and pretty much the whole system I replaced a broken EBR NOzzle, 
And tested all the programs ,
please the next time you reset the system make sure that
the dispense nozzle is not over the chuck , if you do that  the
chuck will come up and will brake the EBR nozzle.