Problem svgcoat SNF 2008-06-16 11:51:43: poor spin 955 iline

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jun 17 14:05:55 PDT 2008


ompleted PM to svg coat  tool, I cleaned the , filter for the SC~VG recovery resist pump system ,catch cup and pretty much the whole system I replaced a broken EBR NOzzle, 
And tested all the programs ,
please the next time you reset the system make sure that
the dispense nozzle is not over the chuck , if you do that  the
chuck will come up and will brake the EBR nozzle.




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