Problem svgcoat SNF 2008-06-19 10:53:51: 955-.7

mahnaz at mahnaz at
Thu Jun 19 10:53:51 PDT 2008

ran 10 dummies, cleaned the nozzel , I need .7 um to run the 
qual on asml after software change . first wafer has huge EBR
splashes all over the wafer.
I think that the track should be shut down.

More information about the svgcoat-pcs mailing list