Shutdown svgcoat SNF 2008-06-19 10:54:25: EBR splash

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Jun 19 10:54:26 PDT 2008


ran 10 dummies, cleaned the nozzel , I need .7 um to run the 
qual on asml after software change . first wafer has huge EBR
splashes all over the wafer.
I think that the track should be shut down. It most likely be the same for all programs.




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