Shutdown svgcoat SNF 2008-06-20 16:15:29: HPO Lifter problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 20 17:54:47 PDT 2008


There is a broken motor mount on the lifter motor causing too moch flex on the lifter leadscrew. The leadscrew binds up and lifters do not raise to the up position. Temporarilly secured the motor mount with tie-wraps. Cycled 25 wafers with no problem. Will order correct parts and make needed repairs. System ready to use.




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