From druist at snf.stanford.edu Tue Mar 4 10:44:06 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Tue, 4 Mar 2008 10:44:06 -0800 Subject: Problem svgcoat SNF 2008-03-04 10:44:05: cool station sensor works intermittently Message-ID: From king at snf.stanford.edu Tue Mar 4 12:44:39 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 4 Mar 2008 12:44:39 -0800 Subject: Problem svgcoat SNF 2008-03-04 12:44:39: lots of particles Message-ID: ran a dispense to clean up but getting intermittent ongoing particle problems. From king at snf.stanford.edu Tue Mar 4 21:40:14 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 4 Mar 2008 21:40:14 -0800 Subject: Comment svgcoat SNF 2008-03-04 21:40:14: Fewer particles Message-ID: I ran four more dispense sequences and it got much better. Check again before running device wafers. From dgunning at snf.stanford.edu Wed Mar 5 05:14:39 2008 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Wed, 5 Mar 2008 05:14:39 -0800 Subject: Problem svgcoat SNF 2008-03-05 05:14:37: controller 2 fails Message-ID: couldn't start recipe running. message on computer reads 'controller 2 fails' ? From mahnaz at snf.stanford.edu Wed Mar 5 10:32:42 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Mar 2008 10:32:42 -0800 Subject: Problem svgcoat SNF 2008-03-05 10:32:41: cool plate sensor Message-ID: needs to be replaced, It has been doing it for a while so please replece it. From mahnaz at snf.stanford.edu Wed Mar 5 10:40:16 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Mar 2008 10:40:16 -0800 Subject: Problem svgcoat SNF 2008-03-05 10:40:15: when did we change/clean Message-ID: catch cup? From mahnaz at snf.stanford.edu Wed Mar 5 11:39:37 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Mar 2008 11:39:37 -0800 Subject: Comment svgcoat SNF 2008-03-05 11:39:37: ran 955 iline perfect Message-ID: thicness ave. 10100 A " 10154 A From gsosa at snf.stanford.edu Wed Mar 5 15:42:09 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Mar 2008 15:42:09 -0800 Subject: Problem svgcoat SNF 2008-01-31 13:06:01: 3612 poor spin issues Message-ID: Checked and adjusted incoming exhaust to system. Spun up many clean test wafers and did not see the unusual pattern. Checked 3612 1.0 micron and 955 1.0 micron thicknesses. Both look good. From gsosa at snf.stanford.edu Wed Mar 5 15:42:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Mar 2008 15:42:45 -0800 Subject: Problem svgcoat SNF 2008-01-23 15:18:33: 1um 3612 Message-ID: Checked and adjusted incoming exhaust to system. Spun up many clean test wafers and did not see the unusual pattern. Checked 3612 1.0 micron and 955 1.0 micron thicknesses. Both look good. From gsosa at snf.stanford.edu Wed Mar 5 15:44:37 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Mar 2008 15:44:37 -0800 Subject: Problem svgcoat SNF 2008-03-05 05:14:37: controller 2 fails Message-ID: there were 2 application windows open. closed out applications and reset PC. From gsosa at snf.stanford.edu Thu Mar 6 08:50:14 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 Mar 2008 08:50:14 -0800 Subject: Problem svgcoat SNF 2008-03-05 10:40:15: when did we change/clean Message-ID: Swapped out cup with clean cup. Tested track operation. all OK. From malekos at snf.stanford.edu Thu Mar 6 14:50:54 2008 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Thu, 6 Mar 2008 14:50:54 -0800 Subject: Problem svgcoat SNF 2008-03-06 14:50:53: How long before the primer will be operational Message-ID: From jparker at snf.stanford.edu Fri Mar 7 13:45:24 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 7 Mar 2008 13:45:24 -0800 Subject: Problem svgcoat SNF 2008-03-07 13:45:24: 7um resist caution Message-ID: Putting down 7um resist is still not reliable. Running with program "4 7um wo/VP 2mm EBR 100s Bake": Very streaky around outside half on all wafers. There is also a suckback issue; a drip hangs out of the nozzle at the end of dispense and every so often drops on the edge of a wafer. The bubble that showed up 50% of the time in the center over the last few months only showed up in 1 of 12 wafers, though. From mahnaz at snf.stanford.edu Mon Mar 10 14:30:53 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Mar 2008 14:30:53 -0700 Subject: Shutdown svgcoat SNF 2008-03-10 14:30:52: chemical leak Message-ID: From gsosa at snf.stanford.edu Mon Mar 10 16:26:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Mar 2008 16:26:18 -0700 Subject: Shutdown svgcoat SNF 2008-03-10 14:30:52: chemical leak Message-ID: Cleaned up solvent at bottom of coater. Cycle tested with 10 dummy wafers. No leak found. Will continue to monitor. From gsosa at snf.stanford.edu Tue Mar 11 11:32:34 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Mar 2008 11:32:34 -0700 Subject: Shutdown svgcoat SNF 2008-03-11 11:32:32: replacing cool plate motor Message-ID: Replacing cool plate belt motor to resolve the wafer transfer issue. From gsosa at snf.stanford.edu Tue Mar 11 12:26:04 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Mar 2008 12:26:04 -0700 Subject: Shutdown svgcoat SNF 2008-03-11 11:32:32: replacing cool plate motor Message-ID: Replaced the belt motor on the coolplate after softbake module. Tested and adjusted belt speed. Cycled 25 wafers through track with no transfer faults. Will continue to monitor. Please report in coral if problem still exists. From gsosa at snf.stanford.edu Tue Mar 11 12:28:16 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Mar 2008 12:28:16 -0700 Subject: Problem svgcoat SNF 2008-01-30 10:53:19: Belt before receiver index Message-ID: Replaced the belt motor on the coolplate after softbake module. Tested and adjusted belt speed. Cycled 25 wafers through track with no transfer faults. Will continue to monitor. Please report in coral if problem still exists. From gsosa at snf.stanford.edu Tue Mar 11 12:28:28 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Mar 2008 12:28:28 -0700 Subject: Comment svgcoat SNF 2008-02-24 20:37:05: Re: Belt before receiver index Message-ID: Replaced the belt motor on the coolplate after softbake module. Tested and adjusted belt speed. Cycled 25 wafers through track with no transfer faults. Will continue to monitor. Please report in coral if problem still exists. From gsosa at snf.stanford.edu Tue Mar 11 12:29:20 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Mar 2008 12:29:20 -0700 Subject: Problem svgcoat SNF 2008-03-05 10:32:41: cool plate sensor Message-ID: Replaced the belt motor on the coolplate after softbake module. Tested and adjusted belt speed. Cycled 25 wafers through track with no transfer faults. Will continue to monitor. Please report in coral if problem still exists. From jsuarez at snf.stanford.edu Wed Mar 12 09:22:31 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Wed, 12 Mar 2008 09:22:31 -0700 Subject: Comment svgcoat SNF 2008-03-12 09:22:31: Line ("streak") on wfs' backside Message-ID: need to have track belts and hotplate clean. my wfs need to have very clean backside (for ASML) Thank you From jsuarez at snf.stanford.edu Wed Mar 12 10:54:31 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Wed, 12 Mar 2008 10:54:31 -0700 Subject: Problem svgcoat SNF 2008-03-12 10:54:30: intermitent backside problem Message-ID: most wafers were clean on backside, few (7 out of 25 wfs) had some kind of 'contamination' From mahnaz at snf.stanford.edu Thu Mar 13 09:55:23 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Mar 2008 09:55:23 -0700 Subject: Shutdown svgcoat SNF 2008-03-13 09:55:22: ebr valve is broken. Message-ID: From gsosa at snf.stanford.edu Thu Mar 13 10:14:30 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Mar 2008 10:14:30 -0700 Subject: Shutdown svgcoat SNF 2008-03-13 09:55:22: ebr valve is broken. Message-ID: Replaced the canister regulator and adjusted pressure to setpoint. Tested EBR- All OK From gsosa at snf.stanford.edu Mon Mar 17 07:34:32 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 17 Mar 2008 07:34:32 -0700 Subject: Shutdown svgcoat SNF 2008-03-17 07:34:31: Vendor working on system Message-ID: Vendor is here to work on vapor prime problem. From gsosa at snf.stanford.edu Mon Mar 17 14:45:50 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 17 Mar 2008 14:45:50 -0700 Subject: Shutdown svgcoat SNF 2008-03-17 07:34:31: Vendor working on system Message-ID: The vapor prime module is still offline. Hardware and software engineers will return at a later date for indepth troubleshooting of module and wiring harness. System is usable without vapor prime module. From gsosa at snf.stanford.edu Mon Mar 17 14:49:15 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 17 Mar 2008 14:49:15 -0700 Subject: Comment svgcoat SNF 2008-03-17 14:49:14: Vapor Prime Module Status Message-ID: The vapor prime module is still offline. Hardware and software engineers will return at a later date for indepth troubleshooting of module and wiring harness. System is usable without vapor prime module. From jsuarez at snf.stanford.edu Mon Mar 24 10:15:24 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 24 Mar 2008 10:15:24 -0700 Subject: Comment svgcoat SNF 2008-03-24 10:15:24: dirty backside Message-ID: wfs not clean on backside. next step for my wfs will be in asml- please clean belts and hotplate thank you From vilanova at snf.stanford.edu Tue Mar 25 15:13:56 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:13:56 -0700 Subject: Comment svgcoat SNF 2008-03-24 10:15:24: dirty backside Message-ID: cleaned From vilanova at snf.stanford.edu Tue Mar 25 15:18:35 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:18:35 -0700 Subject: Comment svgcoat SNF 2008-02-08 17:44:13: 7um streaky Message-ID: Purged Line and adjusted the Rate dispense and suck back Cycled Wafers and the uniformity was good all around. Clean the dispense hose before you use it , Use only a qtip and acetone. From vilanova at snf.stanford.edu Tue Mar 25 15:18:51 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:18:51 -0700 Subject: Problem svgcoat SNF 2008-03-07 13:45:24: 7um resist caution Message-ID: Purged Line and adjusted the Rate dispense and suck back Cycled Wafers and the uniformity was good all around. Clean the dispense hose before you use it , Use only a qtip and acetone. From vilanova at snf.stanford.edu Tue Mar 25 15:19:35 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:19:35 -0700 Subject: Comment svgcoat SNF 2008-03-12 09:22:31: Line ("streak") on wfs' backside Message-ID: Worked on it, cleaned the hotplate and belts. From vilanova at snf.stanford.edu Tue Mar 25 15:19:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:19:53 -0700 Subject: Problem svgcoat SNF 2008-03-12 10:54:30: intermitent backside problem Message-ID: Cleaned From vilanova at snf.stanford.edu Tue Mar 25 15:20:50 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:20:50 -0700 Subject: Comment svgcoat SNF 2008-02-26 16:10:47: Re: Belt before receiver Message-ID: this was done A long time ago .. From vilanova at snf.stanford.edu Tue Mar 25 15:22:01 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:22:01 -0700 Subject: Comment svgcoat SNF 2008-01-20 18:19:48: temp error Message-ID: temp controller was replaced a few weeks ago. From vilanova at snf.stanford.edu Tue Mar 25 15:22:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:22:27 -0700 Subject: Problem svgcoat SNF 2008-03-04 12:44:39: lots of particles Message-ID: cleared. From vilanova at snf.stanford.edu Tue Mar 25 15:22:36 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:22:36 -0700 Subject: Comment svgcoat SNF 2008-03-04 21:40:14: Fewer particles Message-ID: cleared. From vilanova at snf.stanford.edu Tue Mar 25 15:22:57 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:22:57 -0700 Subject: Problem svgcoat SNF 2008-03-04 10:44:05: cool station sensor works intermittently Message-ID: Motor was replaced a few weeks ago. From vilanova at snf.stanford.edu Tue Mar 25 15:23:38 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:23:38 -0700 Subject: Comment svgcoat SNF 2008-01-30 12:16:22: Addition to above jparker comment Message-ID: cleared. From vilanova at snf.stanford.edu Tue Mar 25 15:24:25 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:24:25 -0700 Subject: Comment svgcoat SNF 2008-01-28 07:51:40: Post bake hotplate not working Message-ID: hotplate got replaced a few weeks ago.