From mahnaz at snf.stanford.edu Fri May 9 15:50:45 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 May 2008 15:50:45 -0700 Subject: Comment svgcoat SNF 2008-05-09 15:50:45: 1um and 7um Message-ID: Mario worked on the track this morning. He ran 1 um and 7 um, both wafers looked very good. From mvikram at snf.stanford.edu Mon May 12 19:20:20 2008 From: mvikram at snf.stanford.edu (mvikram at snf.stanford.edu) Date: Mon, 12 May 2008 19:20:20 -0700 Subject: Problem svgcoat SNF 2008-05-12 19:20:19: spin coat station stuck Message-ID: From vilanova at snf.stanford.edu Tue May 13 07:25:47 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 May 2008 07:25:47 -0700 Subject: Problem svgcoat SNF 2008-05-12 19:20:19: spin coat station stuck Message-ID: I guess someone forgot to empty the small waste That's the only thing I can think of , I ran and cleaned all the dummy wafers without a problem, good to use. From vilanova at snf.stanford.edu Tue May 13 07:36:22 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 May 2008 07:36:22 -0700 Subject: Comment svgcoat SNF 2008-02-27 16:50:47: cleaned most dummies Message-ID: I cleaned all the dummy wafers I found Once again a lot used qtips in the regular garbage they dont go there they go in a plastic zip lock bag and into the waste container next to the regular garbage!!!!! From vilanova at snf.stanford.edu Wed May 14 08:24:08 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 May 2008 08:24:08 -0700 Subject: Comment svgcoat SNF 2008-05-14 08:24:08: 3612 Resist bottle Message-ID: We found earlier today that someone did not replace the empty bottle from the system , instead they just moved the bottle sideway so they could use the last drop of resist, this is dangerous!!! they just turned off the alarm and left the system in such a bad shape for the next user!!!! Replaced bottle ran 14 wafers System back to normal! ok to use. From vilanova at snf.stanford.edu Thu May 15 08:27:03 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 May 2008 08:27:03 -0700 Subject: Comment svgcoat SNF 2008-05-15 08:27:02: CLEANED DUMMY WAFERS COAT/DEVELOPER Message-ID: I JUST FINISHED CLEANING ALL THE DUMMY WAFERS FOR THE COATER AND DEVELOPER TRACKS, PLEASE DO NOT USE THE DEVELOPER DUMMY WAFERS AS COATER DUMMIES, THERES PLENTY OF DUMMY WAFERS ON BOTH BOXES ( DEVELOPER. COATER ) From mahnaz at snf.stanford.edu Mon May 19 10:39:50 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 19 May 2008 10:39:50 -0700 Subject: Problem svgcoat SNF 2008-05-19 10:39:50: not working Message-ID: alarmin, wafers get s stuck on the chuck. From vilanova at snf.stanford.edu Mon May 19 13:33:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 May 2008 13:33:27 -0700 Subject: Problem svgcoat SNF 2008-05-19 10:39:50: not working Message-ID: Adjusted , cleaned, lubricated spindle. From vilanova at snf.stanford.edu Wed May 28 14:12:00 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 May 2008 14:12:00 -0700 Subject: Comment svgcoat SNF 2008-05-15 08:27:02: CLEANED DUMMY WAFERS COAT/DEVELOPER Message-ID: cleaned catch cup and dummies. From nvgirish at snf.stanford.edu Fri May 30 00:57:16 2008 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Fri, 30 May 2008 00:57:16 -0700 Subject: Problem svgcoat SNF 2008-05-30 00:57:14: Not dispensing properly Message-ID: Dispenser for 3612 spurts out, instead of slowly dispensing. From vilanova at snf.stanford.edu Fri May 30 07:31:31 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 30 May 2008 07:31:31 -0700 Subject: Problem svgcoat SNF 2008-05-30 00:57:14: Not dispensing properly Message-ID: dispense working normal cycled wafers and dispense looks good, sometimes if there's a new resist bottle and it hasnt been purge theres air bubbles in the line this makes the dispenseunstable. Just run a couple of dummies & that should take care of the problem.