Problem svgcoat SNF 2008-05-12 19:20:19: spin coat station stuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue May 13 07:25:47 PDT 2008


I guess someone forgot to empty the small waste
That's the only thing I can think of , I ran and cleaned all the
dummy wafers without a problem, good to use. 




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