Problem svgcoat SNF 2008-05-30 00:57:14: Not dispensing properly

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri May 30 07:31:31 PDT 2008


dispense working normal cycled wafers and dispense 
looks good, sometimes if there's a new resist bottle
and it hasnt been purge theres air bubbles in the line
this makes the dispenseunstable. Just run  a couple of 
dummies & that should take care of the problem.




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