From gsosa at snf.stanford.edu Mon Nov 3 08:54:55 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Nov 2008 08:54:55 -0800 Subject: Comment svgcoat SNF 2008-11-03 08:54:53: SPR 955-0.7 Test 11/3 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6954 Angstroms, Std Dev. 1 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From yspark at snf.stanford.edu Mon Nov 3 17:29:25 2008 From: yspark at snf.stanford.edu (yspark at snf.stanford.edu) Date: Mon, 3 Nov 2008 17:29:25 -0800 Subject: Problem svgcoat SNF 2008-11-03 17:29:25: wafer stuck after pr coating Message-ID: wafer transfer stopped. manually removed wafer. From vilanova at snf.stanford.edu Tue Nov 4 07:51:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Nov 2008 07:51:45 -0800 Subject: Problem svgcoat SNF 2008-11-03 17:29:25: wafer stuck after pr coating Message-ID: Operator Error, Cycled many wafers and System working perfectly fine. , ok to use From lindaw at snf.stanford.edu Wed Nov 5 13:35:59 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 5 Nov 2008 13:35:59 -0800 Subject: Comment svgcoat SNF 2008-11-05 13:35:59: bottle empty alarming Message-ID: From vilanova at snf.stanford.edu Wed Nov 5 14:16:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Nov 2008 14:16:53 -0800 Subject: Comment svgcoat SNF 2008-11-05 13:35:59: bottle empty alarming Message-ID: the sensor was Off of the hose , re attached sensor , tested , ok to use. From king at snf.stanford.edu Thu Nov 6 00:31:29 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 6 Nov 2008 00:31:29 -0800 Subject: Problem svgcoat SNF 2008-11-06 00:31:28: Mouse Message-ID: The SunRay mouse by the SVG coater needs to be cleaned or changed. Maybe we could have a "Misc" on coral to write these various things up. From mtan at snf.stanford.edu Thu Nov 6 10:19:27 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Thu, 6 Nov 2008 10:19:27 -0800 Subject: Problem svgcoat SNF 2008-11-06 10:19:26: spr220 lost pressure Message-ID: Does not dispense evenly, and it will not spin From gsosa at snf.stanford.edu Thu Nov 6 11:50:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 Nov 2008 11:50:18 -0800 Subject: Problem svgcoat SNF 2008-11-06 10:19:26: spr220 lost pressure Message-ID: Wafers not spinning. Replaced 3A fuse for spindle motor. Cleaned the process bowl and nozzles. Tested thick resist program. all looks OK. From vilanova at snf.stanford.edu Fri Nov 7 07:25:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Nov 2008 07:25:44 -0800 Subject: Problem svgcoat SNF 2008-11-06 00:31:28: Mouse Message-ID: mouse has been fixed From gsosa at snf.stanford.edu Tue Nov 11 09:07:06 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Nov 2008 09:07:06 -0800 Subject: Comment svgcoat SNF 2008-11-11 09:07:06: SPR-955 .7 Thickness test 11/11 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6952 Angstroms, Std Dev. 3 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From petzold at snf.stanford.edu Fri Nov 14 18:36:49 2008 From: petzold at snf.stanford.edu (petzold at snf.stanford.edu) Date: Fri, 14 Nov 2008 18:36:49 -0800 Subject: Problem svgcoat SNF 2008-11-14 18:36:46: computer frozen Message-ID: Righthand computer frozen while operating track 1. Finished processing on track 2. From dgrbovic at snf.stanford.edu Fri Nov 14 19:42:54 2008 From: dgrbovic at snf.stanford.edu (dgrbovic at snf.stanford.edu) Date: Fri, 14 Nov 2008 19:42:54 -0800 Subject: Comment svgcoat SNF 2008-11-14 19:42:54: computer unfrozen Message-ID: Rebooted computer and performed track reset. Worked properly From rebeccat at snf.stanford.edu Sat Nov 15 19:14:31 2008 From: rebeccat at snf.stanford.edu (rebeccat at snf.stanford.edu) Date: Sat, 15 Nov 2008 19:14:31 -0800 Subject: Comment svgcoat SNF 2008-11-15 19:14:31: problem recognizing send cassette Message-ID: Track1 had trouble recognizing when a cassette was in the send station. Sensor problem? Software problem? From vilanova at snf.stanford.edu Mon Nov 17 07:18:59 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Nov 2008 07:18:59 -0800 Subject: Problem svgcoat SNF 2008-11-14 18:36:46: computer frozen Message-ID: COmputer working FIne , After user re iitialized system . From vilanova at snf.stanford.edu Mon Nov 17 07:19:15 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Nov 2008 07:19:15 -0800 Subject: Comment svgcoat SNF 2008-11-14 19:42:54: computer unfrozen Message-ID: COmputer working FIne , After user re iitialized system . From vilanova at snf.stanford.edu Mon Nov 17 07:43:36 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Nov 2008 07:43:36 -0800 Subject: Comment svgcoat SNF 2008-11-15 19:14:31: problem recognizing send cassette Message-ID: Cycled many dumym wafers , I couldnt repeat the user problem, ok to use. From gsosa at snf.stanford.edu Tue Nov 18 09:05:58 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 Nov 2008 09:05:58 -0800 Subject: Comment svgcoat SNF 2008-11-18 09:05:58: 11/18 955 Thickness test 0.7um Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6955 Angstroms, Std Dev. 2 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From rcordova at snf.stanford.edu Thu Nov 20 09:16:02 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 20 Nov 2008 09:16:02 -0800 Subject: Problem svgcoat SNF 2008-11-20 09:16:01: Centering is off. Message-ID: Wafers load, and center then they move just before dropping down to spin. Causes a bad noise during high spin speed From gsosa at snf.stanford.edu Thu Nov 20 10:09:08 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Nov 2008 10:09:08 -0800 Subject: Shutdown svgcoat SNF 2008-11-20 10:09:08: Spindle noise Message-ID: Spindle noise at high speed. From gsosa at snf.stanford.edu Thu Nov 20 16:10:56 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Nov 2008 16:10:56 -0800 Subject: Shutdown svgcoat SNF 2008-11-20 10:09:08: Spindle noise Message-ID: Spindle making noise at high speed. Removed spindle and installed rebuilt spindle assembly. Did spindle calibration. checked wafer centering. Tested track operation. All OK. From gsosa at snf.stanford.edu Thu Nov 20 16:11:55 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Nov 2008 16:11:55 -0800 Subject: Problem svgcoat SNF 2008-11-20 09:16:01: Centering is off. Message-ID: Spindle making noise at high speed. Removed spindle and installed rebuilt spindle assembly. Did spindle calibration. checked wafer centering. Tested track operation. All OK. From gsosa at snf.stanford.edu Thu Nov 20 16:12:26 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Nov 2008 16:12:26 -0800 Subject: Shutdown svgcoat SNF 2008-11-20 16:12:25: Spindle problem Message-ID: Not spinning at low speed From gsosa at snf.stanford.edu Thu Nov 20 16:14:21 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Nov 2008 16:14:21 -0800 Subject: Shutdown svgcoat SNF 2008-11-20 16:12:25: Spindle problem Message-ID: Wrong system. Should be track 2 From sjinpark at snf.stanford.edu Thu Nov 20 21:20:17 2008 From: sjinpark at snf.stanford.edu (sjinpark at snf.stanford.edu) Date: Thu, 20 Nov 2008 21:20:17 -0800 Subject: Problem svgcoat SNF 2008-11-20 21:20:17: Spindle mid? error Message-ID: Looks like spindle is dead. From gsosa at snf.stanford.edu Fri Nov 21 08:24:43 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Nov 2008 08:24:43 -0800 Subject: Problem svgcoat SNF 2008-11-20 21:20:17: Spindle mid? error Message-ID: Cycled power on the system manager PC. Reset track controllers. Tested track operation. All OK. From mahnaz at snf.stanford.edu Mon Nov 24 16:27:27 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 24 Nov 2008 16:27:27 -0800 Subject: Problem svgcoat SNF 2008-11-24 16:27:25: slow Message-ID: wafers are very slow going to bake station from spin. i helped few wafers but does not center and is close to one end. I suggest to keep an eye on it as easily can break the wfs. From vilanova at snf.stanford.edu Tue Nov 25 07:53:15 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Nov 2008 07:53:15 -0800 Subject: Problem svgcoat SNF 2008-11-24 16:27:25: slow Message-ID: cleaned up resist residues from pulleys hotplate and belts, adjusted Wafer In Speed , tested , ok to use.