Comment svgcoat SNF 2008-11-03 08:54:53: SPR 955-0.7 Test 11/3

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 3 08:54:55 PST 2008


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6954  Angstroms, Std Dev. 1 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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