Problem svgcoat SNF 2008-11-06 10:19:26: spr220 lost pressure

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Nov 6 11:50:18 PST 2008


Wafers not spinning. Replaced 3A fuse for spindle motor. Cleaned the process bowl and nozzles. Tested thick resist program. all looks OK.




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