Comment svgcoat SNF 2008-11-11 09:07:06: SPR-955 .7 Thickness test 11/11

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Nov 11 09:07:06 PST 2008


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6952  Angstroms, Std Dev. 3 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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