Comment svgcoat SNF 2008-11-18 09:05:58: 11/18 955 Thickness test 0.7um

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Nov 18 09:05:58 PST 2008


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6955  Angstroms, Std Dev. 2 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




More information about the svgcoat-pcs mailing list