Shutdown svgcoat SNF 2008-11-20 10:09:08: Spindle noise

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Nov 20 16:10:56 PST 2008


Spindle making noise at high speed. Removed spindle and installed rebuilt spindle assembly. Did spindle calibration. checked wafer centering. Tested track operation. All OK.




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