From maryamzm at snf.stanford.edu Wed Oct 1 18:17:33 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Wed, 1 Oct 2008 18:17:33 -0700 Subject: Problem svgcoat SNF 2008-10-01 18:17:33: Wafer handling problem Message-ID: The senser station doesn't grab the wafer...I tried to reset the station several times but didn't help. From gsosa at snf.stanford.edu Thu Oct 2 09:04:05 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 2 Oct 2008 09:04:05 -0700 Subject: Problem svgcoat SNF 2008-10-01 18:17:33: Wafer handling problem Message-ID: Had to turn off a recipe that had a vapor prime program in it. Tested track operation. All OK From jparker at snf.stanford.edu Tue Oct 7 11:59:14 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 7 Oct 2008 11:59:14 -0700 Subject: Comment svgcoat SNF 2008-10-07 11:59:14: 10/7 uniformity test Message-ID: ***1 um / 3612: Looks uniform, ebr correct, hotplate clean. Average: 10331 Ang / Std. dev. 16 Ang. (Top:10349A / Center:10305A / Flat:10338A / Left:10330A / Right:10333A) ***1.6 um / 3612: Looks uniform Average: 17228 Ang / Std. dev. 13 Ang. (Top:17226A / Center:17217A / Flat:17249A / Left:17218A / Right:17228A) *** 7 um / 220-7: Above average uniformity (but minor streaks near edge). Average: 73376 Ang / Std dev: 64 Ang. (Top:73273A / Center:73359A / Flat:73404A / Left:73434A / Right:73411A) From ahryciw at snf.stanford.edu Tue Oct 7 17:16:46 2008 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Tue, 7 Oct 2008 17:16:46 -0700 Subject: Problem svgcoat SNF 2008-10-07 17:16:45: Resist rring on hotplate Message-ID: Coater was found with a ~1/4"-wide ring of resist baked onto the hotplate. From gsosa at snf.stanford.edu Wed Oct 8 10:39:52 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Oct 2008 10:39:52 -0700 Subject: Problem svgcoat SNF 2008-10-07 17:16:45: Resist rring on hotplate Message-ID: Cleaned off the resist ring on the hotplate oven. From cearhart at snf.stanford.edu Wed Oct 8 21:24:22 2008 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Wed, 8 Oct 2008 21:24:22 -0700 Subject: Problem svgcoat SNF 2008-10-08 21:24:14: Message-ID: Front track not working, even after resetting track. From ajamo at snf.stanford.edu Wed Oct 8 23:42:59 2008 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 8 Oct 2008 23:42:59 -0700 Subject: Problem svgcoat SNF 2008-10-08 23:42:59: not loading Message-ID: I reset the sender& receiver boats, rocked them. reset entire track, when start button is pushed the belts on the sender do not start and pick up the wafer From gsosa at snf.stanford.edu Thu Oct 9 08:37:48 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Oct 2008 08:37:48 -0700 Subject: Problem svgcoat SNF 2008-10-08 21:24:14: Message-ID: Wafer carriers on vapor prime jambed in down position. free'd up the wafer lifters. reset s/w amd hardware. Cycle 25 wafers. All OK. From gsosa at snf.stanford.edu Thu Oct 9 08:37:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Oct 2008 08:37:57 -0700 Subject: Problem svgcoat SNF 2008-10-08 23:42:59: not loading Message-ID: Wafer carriers on vapor prime jambed in down position. free'd up the wafer lifters. reset s/w amd hardware. Cycle 25 wafers. All OK. From nvgirish at snf.stanford.edu Sat Oct 11 19:12:28 2008 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Sat, 11 Oct 2008 19:12:28 -0700 Subject: Problem svgcoat SNF 2008-10-11 19:12:28: 2mm EBR? Message-ID: Recipe #7 2mmEBR wo VP is showing WAY more than 2mm EBR. From ywidjaja at snf.stanford.edu Sun Oct 12 08:05:59 2008 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sun, 12 Oct 2008 08:05:59 -0700 Subject: Problem svgcoat SNF 2008-10-12 08:05:58: "wash arm" fell off Message-ID: the arm fell off during EBR step From gsosa at snf.stanford.edu Mon Oct 13 07:27:05 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Oct 2008 07:27:05 -0700 Subject: Shutdown svgcoat SNF 2008-10-13 07:27:04: EBR arm broken Message-ID: EBR arm is broken From gsosa at snf.stanford.edu Mon Oct 13 15:27:15 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Oct 2008 15:27:15 -0700 Subject: Shutdown svgcoat SNF 2008-10-13 07:27:04: EBR arm broken Message-ID: Replaced the dispense arm. Re-attached dispense nozzle bracket and EBR nozzle bracket to new dispense arm. Mechanically adjusted dispense nozzle centering in "Y" direction. Mechanically adjusted arm position for coarse EBR adjustment and fine tuned with controller for 2mm EBR. Checked and corrected dispense nozzle centering in "X" independently for nozzle 1, 2 and 3 through controller. Tested with resist programs. All looks good. Cleaned process bowl. Tested track operation. All OK. From gsosa at snf.stanford.edu Mon Oct 13 15:27:24 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Oct 2008 15:27:24 -0700 Subject: Problem svgcoat SNF 2008-10-12 08:05:58: "wash arm" fell off Message-ID: Replaced the dispense arm. Re-attached dispense nozzle bracket and EBR nozzle bracket to new dispense arm. Mechanically adjusted dispense nozzle centering in "Y" direction. Mechanically adjusted arm position for coarse EBR adjustment and fine tuned with controller for 2mm EBR. Checked and corrected dispense nozzle centering in "X" independently for nozzle 1, 2 and 3 through controller. Tested with resist programs. All looks good. Cleaned process bowl. Tested track operation. All OK. From gsosa at snf.stanford.edu Mon Oct 13 15:27:33 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Oct 2008 15:27:33 -0700 Subject: Problem svgcoat SNF 2008-10-11 19:12:28: 2mm EBR? Message-ID: Replaced the dispense arm. Re-attached dispense nozzle bracket and EBR nozzle bracket to new dispense arm. Mechanically adjusted dispense nozzle centering in "Y" direction. Mechanically adjusted arm position for coarse EBR adjustment and fine tuned with controller for 2mm EBR. Checked and corrected dispense nozzle centering in "X" independently for nozzle 1, 2 and 3 through controller. Tested with resist programs. All looks good. Cleaned process bowl. Tested track operation. All OK. From rcordova at snf.stanford.edu Tue Oct 14 16:01:45 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 14 Oct 2008 16:01:45 -0700 Subject: Problem svgcoat SNF 2008-10-14 16:01:44: 3612 pr #7 w/o vapor prime 2mm EBR Message-ID: Getting very wide (5-7MM)EBR on most wafers. I showed samples to Gary Sosa From gsosa at snf.stanford.edu Tue Oct 14 16:14:29 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Oct 2008 16:14:29 -0700 Subject: Comment svgcoat SNF 2008-10-14 16:14:28: SPR 955-.7 Test Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Mean thickness: 6969 Angstroms, Std Dev. 9 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From gsosa at snf.stanford.edu Wed Oct 15 09:48:26 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Oct 2008 09:48:26 -0700 Subject: Problem svgcoat SNF 2008-10-14 16:01:44: 3612 pr #7 w/o vapor prime 2mm EBR Message-ID: Had to re-adjust the EBR nozzle "Y" position. The nozzle was hitting the home position cutout, causing the nozzle mis-position. Checked and adjusted 2mm EBR width. All looks OK. From uli at snf.stanford.edu Wed Oct 15 11:39:02 2008 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 15 Oct 2008 11:39:02 -0700 Subject: Problem svgcoat SNF 2008-10-15 11:39:01: Prog 7 3612 5mm EBR looks more like 2mm Message-ID: From gsosa at snf.stanford.edu Thu Oct 16 09:00:30 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 16 Oct 2008 09:00:30 -0700 Subject: Problem svgcoat SNF 2008-10-15 11:39:01: Prog 7 3612 5mm EBR looks more like 2mm Message-ID: Checked EBR width and made correction in the recipe. Also cleaned the coater bowl and tested track operation. All Ok. From ajamo at snf.stanford.edu Fri Oct 17 16:24:08 2008 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 17 Oct 2008 16:24:08 -0700 Subject: Problem svgcoat SNF 2008-10-17 16:24:07: chuck very noisy & NOT SPINNING Message-ID: Chuck making squeaking/grinding noises for first 5 wafers. refused to spin on the 6th wafer. I had to rescue my wafer with a puddle of resist on in - very messy. From cfchiang at snf.stanford.edu Fri Oct 17 22:51:31 2008 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Fri, 17 Oct 2008 22:51:31 -0700 Subject: Problem svgcoat SNF 2008-10-17 22:51:31: spiner doesn't spin when tried to coat 10um PR Message-ID: From chen0622 at snf.stanford.edu Sat Oct 18 08:32:34 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Sat, 18 Oct 2008 08:32:34 -0700 Subject: Problem svgcoat SNF 2008-10-18 08:32:33: the spinle is not turing, could not coat resist Message-ID: From shott at snf.stanford.edu Sat Oct 18 10:08:48 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 18 Oct 2008 10:08:48 -0700 Subject: Shutdown svgcoat SNF 2008-10-18 10:08:47: Spindle not turning .... Message-ID: Three folks have reported that the spindle is not turning .... I think that it is prudent to shutdown svgcoat rather than have more people find that the spindle does not turn. John From vilanova at snf.stanford.edu Mon Oct 20 11:42:05 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:42:05 -0700 Subject: Shutdown svgcoat SNF 2008-10-18 10:08:47: Spindle not turning .... Message-ID: Replaced burned Fuse, cleaned spindle , catch cup , hotplate, Exhaust system , we also cleaned up all the dummy wafers and replaced the dummy box ( it was full of resist ) Calibrated Spindle , cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Oct 20 11:42:19 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:42:19 -0700 Subject: Problem svgcoat SNF 2008-10-17 16:24:07: chuck very noisy & NOT SPINNING Message-ID: Replaced burned Fuse, cleaned spindle , catch cup , hotplate, Exhaust system , we also cleaned up all the dummy wafers and replaced the dummy box ( it was full of resist ) Calibrated Spindle , cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Oct 20 11:42:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:42:29 -0700 Subject: Problem svgcoat SNF 2008-10-17 22:51:31: spiner doesn't spin when tried to coat 10um PR Message-ID: Replaced burned Fuse, cleaned spindle , catch cup , hotplate, Exhaust system , we also cleaned up all the dummy wafers and replaced the dummy box ( it was full of resist ) Calibrated Spindle , cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Oct 20 11:42:38 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:42:38 -0700 Subject: Problem svgcoat SNF 2008-10-18 08:32:33: the spinle is not turing, could not coat resist Message-ID: Replaced burned Fuse, cleaned spindle , catch cup , hotplate, Exhaust system , we also cleaned up all the dummy wafers and replaced the dummy box ( it was full of resist ) Calibrated Spindle , cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Oct 20 11:42:49 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:42:49 -0700 Subject: Problem svgcoat SNF 2008-09-29 07:55:56: calibration Message-ID: Replaced burned Fuse, cleaned spindle , catch cup , hotplate, Exhaust system , we also cleaned up all the dummy wafers and replaced the dummy box ( it was full of resist ) Calibrated Spindle , cycled wafers, ok to use. From rostam at snf.stanford.edu Mon Oct 20 19:32:44 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 20 Oct 2008 19:32:44 -0700 Subject: Problem svgcoat SNF 2008-10-20 19:32:43: random big streaks for 955 1um Message-ID: From vilanova at snf.stanford.edu Tue Oct 21 07:51:48 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Oct 2008 07:51:48 -0700 Subject: Problem svgcoat SNF 2008-10-20 19:32:43: random big streaks for 955 1um Message-ID: cleaned dispense hosecycled ( 5 each time , twice ) many wafers, Uniformity looks Good, ok to use. From mahnaz at snf.stanford.edu Wed Oct 22 17:18:29 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 22 Oct 2008 17:18:29 -0700 Subject: Problem svgcoat SNF 2008-10-22 17:18:29: Back side EBR residue Message-ID: Out of 10 wafers ran by shasumal 3612 1 um 9 wfera had EBR residue on the back and few wafers very rough EBR on top. We have shown the wafer to Gary this afternoon. From mleone at snf.stanford.edu Fri Oct 24 10:33:43 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Fri, 24 Oct 2008 10:33:43 -0700 Subject: Problem svgcoat SNF 2008-10-24 10:33:42: cooling plate sensor is off Message-ID: keep getting alarms on the cooling plate after bake. not sensing wafer correctly From gsosa at snf.stanford.edu Fri Oct 24 15:22:29 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Oct 2008 15:22:29 -0700 Subject: Problem svgcoat SNF 2008-10-22 17:18:29: Back side EBR residue Message-ID: Checked and adjusted wafer centering. Checked backside wash with glass wafer- Looks good. Tested track by coating 10 wafers. Topside EBR looks even and no backside residue. From gsosa at snf.stanford.edu Fri Oct 24 15:27:22 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Oct 2008 15:27:22 -0700 Subject: Problem svgcoat SNF 2008-10-24 10:33:42: cooling plate sensor is off Message-ID: Tested track operation with test wafers. All looks good. From rcordova at snf.stanford.edu Sat Oct 25 14:40:41 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sat, 25 Oct 2008 14:40:41 -0700 Subject: Shutdown svgcoat SNF 2008-10-25 14:40:40: Spin speed motor is dead Message-ID: wafer loads and does not spin resist off. spin speed out of tolerance error. Leavea mess of resist on the chuck! From gsosa at snf.stanford.edu Mon Oct 27 13:51:33 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Oct 2008 13:51:33 -0700 Subject: Shutdown svgcoat SNF 2008-10-25 14:40:40: Spin speed motor is dead Message-ID: Looks like resist migrated into the motor bearings and siezed up the motor. Removed and cleaned up all components on spindle assembly. Installed new spin motor. Calibrated spindle- calibration OK up to 9.9 KRPM. Installed clean process bowl. Checked and adjusted wafer centering. Checked spin coating and EBR. All looks OK. Thickness tests 3612 1.0 micron: Mean- 10243 A, std dev- 13 A. SPR 955 0.7 micron: mean 6889 A, std dev- 6A . 3612 1.6 micron: mean 17060 A, std dev 15 A. Front and back EBR looks good. Track operation OK. System ready to use. From mleone at snf.stanford.edu Tue Oct 28 13:03:13 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Tue, 28 Oct 2008 13:03:13 -0700 Subject: Problem svgcoat SNF 2008-10-28 13:03:13: alarm on cooling plate Message-ID: wafer not being sensed, getting a lot of alarms. system still ok to use From mleone at snf.stanford.edu Tue Oct 28 17:08:15 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Tue, 28 Oct 2008 17:08:15 -0700 Subject: Comment svgcoat SNF 2008-10-28 17:08:15: getting a lot of resist spots on the backside after running prog5 Message-ID: From gsosa at snf.stanford.edu Wed Oct 29 10:26:38 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Oct 2008 10:26:38 -0700 Subject: Problem svgcoat SNF 2008-10-28 13:03:13: alarm on cooling plate Message-ID: Checked and adjusted the chill belt height/position bracket. Adjusted plate lift cam mechanism and top position sensor for better synchronization. Cleaned all transfer belts. Tested all mechanical track functions. Adjusted HPO carraige rail open/close speed for smooth operation. All systems OK. From gsosa at snf.stanford.edu Wed Oct 29 10:28:11 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Oct 2008 10:28:11 -0700 Subject: Comment svgcoat SNF 2008-10-28 17:08:15: getting a lot of resist spots on the backside after running prog5 Message-ID: Cleaned the resist ring off of the hotplate. Ran several wafers with 955 resist, 0.7 micron program. All looks good. From king at snf.stanford.edu Thu Oct 30 00:46:49 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 30 Oct 2008 00:46:49 -0700 Subject: Problem svgcoat SNF 2008-10-30 00:46:48: Track problems Message-ID: After HMDS unit, the wafer proceeds to the cooling plate and then stops. Will not continue to the spin chuck. Have to babysit every wafer. From ywidjaja at snf.stanford.edu Thu Oct 30 02:54:08 2008 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Thu, 30 Oct 2008 02:54:08 -0700 Subject: Problem svgcoat SNF 2008-10-30 02:54:08: 2mm EBR? Message-ID: getting more than 2mm EBR when running prog. 5 SPR 955 1um. From gsosa at snf.stanford.edu Thu Oct 30 09:17:43 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Oct 2008 09:17:43 -0700 Subject: Problem svgcoat SNF 2008-10-30 02:54:08: 2mm EBR? Message-ID: Checked and adjusted top EBR bracket and tightened down screws. Checked 1mm and 2mm width programs. All looks good. From gsosa at snf.stanford.edu Thu Oct 30 09:19:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Oct 2008 09:19:18 -0700 Subject: Problem svgcoat SNF 2008-10-30 00:46:48: Track problems Message-ID: Tested track operation. System ran fine. No errors or alarms generated.