Problem svgcoat SNF 2008-10-08 21:24:14:

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 9 08:37:48 PDT 2008


Wafer carriers on vapor prime jambed in down position. free'd up the wafer lifters. reset s/w amd hardware. Cycle 25 wafers. All OK.




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