Shutdown svgcoat SNF 2008-10-13 07:27:04: EBR arm broken

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 13 15:27:15 PDT 2008


Replaced the dispense arm. Re-attached dispense nozzle bracket and EBR nozzle bracket to new dispense arm.  Mechanically adjusted dispense nozzle centering in "Y" direction.  Mechanically adjusted arm position for coarse EBR adjustment and fine tuned with controller for 2mm EBR. Checked and corrected dispense nozzle centering in "X" independently for nozzle 1, 2 and 3 through controller. Tested with resist programs. All looks good. Cleaned process bowl. Tested track operation. All OK.




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