Comment svgcoat SNF 2008-10-14 16:14:28: SPR 955-.7 Test

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Oct 14 16:14:29 PDT 2008


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Mean thickness: 6969 Angstroms, Std Dev. 9 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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