Problem svgcoat SNF 2008-10-17 16:24:07: chuck very noisy & NOT SPINNING

ajamo at ajamo at
Fri Oct 17 16:24:08 PDT 2008

Chuck making squeaking/grinding noises for first 5 wafers.  refused to spin on the 6th wafer.  I had to rescue my wafer with a puddle of resist on in - very messy.   

More information about the svgcoat-pcs mailing list