Problem svgcoat SNF 2008-10-17 16:24:07: chuck very noisy & NOT SPINNING

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Fri Oct 17 16:24:08 PDT 2008


Chuck making squeaking/grinding noises for first 5 wafers.  refused to spin on the 6th wafer.  I had to rescue my wafer with a puddle of resist on in - very messy.   




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