Problem svgcoat SNF 2008-10-17 16:24:07: chuck very noisy & NOT SPINNING

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 20 11:42:19 PDT 2008


Replaced burned Fuse, cleaned spindle , catch cup , hotplate,
Exhaust system , we also cleaned up all the dummy wafers
and replaced the dummy box ( it was full of resist )
Calibrated Spindle , cycled wafers, ok to use. 




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