Problem svgcoat SNF 2008-10-17 22:51:31: spiner doesn't spin when tried to coat 10um PR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 20 11:42:29 PDT 2008


Replaced burned Fuse, cleaned spindle , catch cup , hotplate,
Exhaust system , we also cleaned up all the dummy wafers
and replaced the dummy box ( it was full of resist )
Calibrated Spindle , cycled wafers, ok to use. 




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