Problem svgcoat SNF 2008-10-18 08:32:33: the spinle is not turing, could not coat resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 20 11:42:38 PDT 2008


Replaced burned Fuse, cleaned spindle , catch cup , hotplate,
Exhaust system , we also cleaned up all the dummy wafers
and replaced the dummy box ( it was full of resist )
Calibrated Spindle , cycled wafers, ok to use. 




More information about the svgcoat-pcs mailing list