Problem svgcoat SNF 2008-10-18 08:32:33: the spinle is not turing, could not coat resist
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Oct 20 11:42:38 PDT 2008
Replaced burned Fuse, cleaned spindle , catch cup , hotplate,
Exhaust system , we also cleaned up all the dummy wafers
and replaced the dummy box ( it was full of resist )
Calibrated Spindle , cycled wafers, ok to use.
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