Problem svgcoat SNF 2008-10-20 19:32:43: random big streaks for 955 1um

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Oct 21 07:51:48 PDT 2008


cleaned dispense hosecycled ( 5 each time , twice ) 
many wafers, Uniformity looks Good, ok to use. 




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