Problem svgcoat SNF 2008-10-22 17:18:29: Back side EBR residue

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Oct 22 17:18:29 PDT 2008


Out of 10 wafers ran by shasumal  3612 1 um
9 wfera had EBR residue on the back and few wafers very rough  EBR on top. We have shown the wafer to Gary  this afternoon.




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