Problem svgcoat SNF 2008-10-22 17:18:29: Back side EBR residue

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Oct 24 15:22:29 PDT 2008


Checked and adjusted wafer centering. Checked backside wash with glass wafer- Looks good. Tested track by coating 10 wafers. Topside EBR looks even and no backside residue.




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