Shutdown svgcoat SNF 2008-10-25 14:40:40: Spin speed motor is dead

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Sat Oct 25 14:40:41 PDT 2008


wafer loads and does not spin resist off.  spin speed out of tolerance error.
Leavea mess of resist on the chuck!




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