Comment svgcoat SNF 2008-10-28 17:08:15: getting a lot of resist spots on the backside after running prog5

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Oct 29 10:28:11 PDT 2008

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Cleaned the resist ring off of the hotplate. Ran several wafers with 955 resist, 0.7 micron program. All looks good.

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