Comment svgcoat SNF 2008-10-28 17:08:15: getting a lot of resist spots on the backside after running prog5

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Oct 29 10:28:11 PDT 2008


Cleaned the resist ring off of the hotplate. Ran several wafers with 955 resist, 0.7 micron program. All looks good.




More information about the svgcoat-pcs mailing list