October 2008 Archives by author

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Starting: Wed Oct 1 18:17:33 PDT 2008
Ending: Thu Oct 30 09:19:18 PDT 2008
Messages: 45

Problem svgcoat SNF 2008-10-07 17:16:45: Resist rring on hotplate ahryciw at snf.stanford.edu
Problem svgcoat SNF 2008-10-08 23:42:59: not loading ajamo at snf.stanford.edu
Problem svgcoat SNF 2008-10-17 16:24:07: chuck very noisy & NOT SPINNING ajamo at snf.stanford.edu
Problem svgcoat SNF 2008-10-08 21:24:14: cearhart at snf.stanford.edu
Problem svgcoat SNF 2008-10-17 22:51:31: spiner doesn't spin when tried to coat 10um PR cfchiang at snf.stanford.edu
Problem svgcoat SNF 2008-10-18 08:32:33: the spinle is not turing, could not coat resist chen0622 at snf.stanford.edu
Problem svgcoat SNF 2008-10-01 18:17:33: Wafer handling problem gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-07 17:16:45: Resist rring on hotplate gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-08 21:24:14: gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-08 23:42:59: not loading gsosa at snf.stanford.edu
Shutdown svgcoat SNF 2008-10-13 07:27:04: EBR arm broken gsosa at snf.stanford.edu
Shutdown svgcoat SNF 2008-10-13 07:27:04: EBR arm broken gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-12 08:05:58: "wash arm" fell off gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-11 19:12:28: 2mm EBR? gsosa at snf.stanford.edu
Comment svgcoat SNF 2008-10-14 16:14:28: SPR 955-.7 Test gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-14 16:01:44: 3612 pr #7 w/o vapor prime 2mm EBR gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-15 11:39:01: Prog 7 3612 5mm EBR looks more like 2mm gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-22 17:18:29: Back side EBR residue gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-24 10:33:42: cooling plate sensor is off gsosa at snf.stanford.edu
Shutdown svgcoat SNF 2008-10-25 14:40:40: Spin speed motor is dead gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-28 13:03:13: alarm on cooling plate gsosa at snf.stanford.edu
Comment svgcoat SNF 2008-10-28 17:08:15: getting a lot of resist spots on the backside after running prog5 gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-30 02:54:08: 2mm EBR? gsosa at snf.stanford.edu
Problem svgcoat SNF 2008-10-30 00:46:48: Track problems gsosa at snf.stanford.edu
Comment svgcoat SNF 2008-10-07 11:59:14: 10/7 uniformity test jparker at snf.stanford.edu
Problem svgcoat SNF 2008-10-30 00:46:48: Track problems king at snf.stanford.edu
Problem svgcoat SNF 2008-10-22 17:18:29: Back side EBR residue mahnaz at snf.stanford.edu
Problem svgcoat SNF 2008-10-01 18:17:33: Wafer handling problem maryamzm at snf.stanford.edu
Problem svgcoat SNF 2008-10-24 10:33:42: cooling plate sensor is off mleone at snf.stanford.edu
Problem svgcoat SNF 2008-10-28 13:03:13: alarm on cooling plate mleone at snf.stanford.edu
Comment svgcoat SNF 2008-10-28 17:08:15: getting a lot of resist spots on the backside after running prog5 mleone at snf.stanford.edu
Problem svgcoat SNF 2008-10-11 19:12:28: 2mm EBR? nvgirish at snf.stanford.edu
Problem svgcoat SNF 2008-10-14 16:01:44: 3612 pr #7 w/o vapor prime 2mm EBR rcordova at snf.stanford.edu
Shutdown svgcoat SNF 2008-10-25 14:40:40: Spin speed motor is dead rcordova at snf.stanford.edu
Problem svgcoat SNF 2008-10-20 19:32:43: random big streaks for 955 1um rostam at snf.stanford.edu
Shutdown svgcoat SNF 2008-10-18 10:08:47: Spindle not turning .... shott at snf.stanford.edu
Problem svgcoat SNF 2008-10-15 11:39:01: Prog 7 3612 5mm EBR looks more like 2mm uli at snf.stanford.edu
Shutdown svgcoat SNF 2008-10-18 10:08:47: Spindle not turning .... vilanova at snf.stanford.edu
Problem svgcoat SNF 2008-10-17 16:24:07: chuck very noisy & NOT SPINNING vilanova at snf.stanford.edu
Problem svgcoat SNF 2008-10-17 22:51:31: spiner doesn't spin when tried to coat 10um PR vilanova at snf.stanford.edu
Problem svgcoat SNF 2008-10-18 08:32:33: the spinle is not turing, could not coat resist vilanova at snf.stanford.edu
Problem svgcoat SNF 2008-09-29 07:55:56: calibration vilanova at snf.stanford.edu
Problem svgcoat SNF 2008-10-20 19:32:43: random big streaks for 955 1um vilanova at snf.stanford.edu
Problem svgcoat SNF 2008-10-12 08:05:58: "wash arm" fell off ywidjaja at snf.stanford.edu
Problem svgcoat SNF 2008-10-30 02:54:08: 2mm EBR? ywidjaja at snf.stanford.edu

Last message date: Thu Oct 30 09:19:18 PDT 2008
Archived on: Fri Jan 11 13:12:19 PST 2013

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