Problem svgcoat SNF 2008-09-05 15:43:41: bad suck back and uniformity on 7 um

vilanova at vilanova at
Mon Sep 8 10:30:13 PDT 2008

maintenance completed. cleaned catch cup ,. exhaust, cycled wafers ( thick resist  7mm) the uniformity looks a lot better
now, we need to ran more test to make sure the system is

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