Problem svgcoat SNF 2008-09-05 15:47:29: EBR splash

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Sep 8 10:30:21 PDT 2008


maintenance completed. cleaned catch cup ,. exhaust, cycled wafers ( thick resist  7mm) the uniformity looks a lot better
now, we need to ran more test to make sure the system is
 consistent.




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