Problem svgcoat SNF 2008-09-08 18:24:42: Edge bead is not 2mm
ccwan at snf.stanford.edu
ccwan at snf.stanford.edu
Mon Sep 8 18:24:44 PDT 2008
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Problem svgcoat SNF 2008-09-08 13:11:57: carriage sensor not sensing wafers
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Problem svgcoat SNF 2008-09-08 18:24:42: Edge bead is not 2mm
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much smaller.....
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Problem svgcoat SNF 2008-09-08 13:11:57: carriage sensor not sensing wafers
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Problem svgcoat SNF 2008-09-08 18:24:42: Edge bead is not 2mm
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