Problem svgcoat SNF 2008-09-15 12:23:27: EBR splatter

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Sep 22 14:22:50 PDT 2008


Replaced the canister regulator with pressure relief style regulator that responds to changes in input pressure and compensates as needed to maintain stable canister pressure. Canister pressure set to 5 PSI. Top EBR dispense was controlled by 3 valves which could have been creating bubbles to form in the EBR dispense line.This would cause the solvent stream to sputtler and create EBR splashes on the wafer. Removed the "air operated valve" and the "solinoid valve" that controlled it.  Now top EBR is controlled by a single dispense valve with more bubbles in dispene line. Adjusted timing in arm programs to optimize EBR and to define 2mm EBR width. Updated all affected programs.  Ran many wafers with much improved results. 




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