Shutdown svgcoat SNF 2008-09-23 11:29:47: belt is broken
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Tue Sep 23 11:53:15 PDT 2008
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Shutdown svgcoat SNF 2008-09-23 11:29:47: belt is broken
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Problem svgcoat SNF 2008-09-23 17:37:02: hot plate track is not running
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replaced broken belt, cycled wafers , ok to use.
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Shutdown svgcoat SNF 2008-09-23 11:29:47: belt is broken
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Problem svgcoat SNF 2008-09-23 17:37:02: hot plate track is not running
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