Problem svgcoat SNF 2008-09-25 17:57:11: hot plate track not opening fully
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Sep 26 09:06:32 PDT 2008
One of the air hoses was touching the arm rail,
this was making the Rail not to fully open , I ran the air hose
through a different location , now the arm works fine , I cycled many wafers with no problem at all.
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