Problem svgcoat SNF 2008-09-25 17:57:11: hot plate track not opening fully

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Sep 26 09:06:32 PDT 2008


One of the air hoses was touching the arm rail, 
this was making the Rail not to fully open ,  I ran the air hose 
through a different location , now the arm works fine , I cycled many wafers with no problem at all.




More information about the svgcoat-pcs mailing list