Shutdown svgcoat SNF 2008-09-26 09:41:14: wafers are not centered.
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Fri Sep 26 09:41:15 PDT 2008
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Problem svgcoat SNF 2008-09-25 17:57:11: hot plate track not opening fully
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Shutdown svgcoat SNF 2008-09-26 09:41:14: wafers are not centered.
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Problem svgcoat SNF 2008-09-25 17:57:11: hot plate track not opening fully
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Shutdown svgcoat SNF 2008-09-26 09:41:14: wafers are not centered.
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