From vilanova at snf.stanford.edu Wed Apr 1 08:13:01 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Apr 2009 08:13:01 -0700 Subject: Problem svgcoat SNF 2009-03-30 14:19:22: EBR back splash Message-ID: Cleaned Catch cup and Exhaust system , Cleaned NOzzles ( dispense , EBR) Hotplates ) Cycled Wafers, Wafer Uniformity looks Great, Ok to use From gsosa at snf.stanford.edu Wed Apr 1 09:09:58 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 1 Apr 2009 09:09:58 -0700 Subject: Problem svgcoat SNF 2009-03-30 14:08:16: 3612 too much dispense Message-ID: Adjusted dispense volume from 8 to 4ml. Adjusted pump speed for timing with sweep of dispense arm to ensure coverage to center of wafer. Checked 1.0 and 1.6 micron thickness- All OK 1.0 micron target: Measured- Mean 10274 Angstroms, Std Dev: 6 A 1.6 micron target: Measured- Mean 17113 Angstroms, Std Dev: 10 A From rostam at snf.stanford.edu Tue Apr 7 17:26:24 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 7 Apr 2009 17:26:24 -0700 Subject: Problem svgcoat SNF 2009-04-07 17:26:23: ran prog 8, the wafer was wobbling Message-ID: From vilanova at snf.stanford.edu Wed Apr 8 07:17:31 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Apr 2009 07:17:31 -0700 Subject: Problem svgcoat SNF 2009-04-07 17:26:23: ran prog 8, the wafer was wobbling Message-ID: ran program 2, 7, and 8 wafers are NOT wobbling I could Not repeat the User Problem, Ok to use. From ginel at snf.stanford.edu Wed Apr 8 17:33:08 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Wed, 8 Apr 2009 17:33:08 -0700 Subject: Comment svgcoat SNF 2009-04-08 17:33:07: Marks/junk on wafer backside Message-ID: The coater left marks and contamination on the wafer backside that needed to be cleaned by hand prior to ASML processing. From helencxy at snf.stanford.edu Wed Apr 15 19:49:44 2009 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Wed, 15 Apr 2009 19:49:44 -0700 Subject: Problem svgcoat SNF 2009-04-15 19:49:44: Audible alarm for "track 1 drain" Message-ID: Track was working fine, but alarm came on and the alarm light for "Track 1 Drain" is on. Can't clear the alarm, so set audible alarm to "OFF". Maybe the resist drain tank of track 1 is full. From vilanova at snf.stanford.edu Thu Apr 16 07:54:23 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 16 Apr 2009 07:54:23 -0700 Subject: Comment svgcoat SNF 2009-04-08 17:33:07: Marks/junk on wafer backside Message-ID: cleaned chuck ,hotplate ,and coater Bowl. From vilanova at snf.stanford.edu Thu Apr 16 07:54:56 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 16 Apr 2009 07:54:56 -0700 Subject: Problem svgcoat SNF 2009-04-15 19:49:44: Audible alarm for "track 1 drain" Message-ID: Empty Drain 1 and 2 Coater tracks, Ok to use , no more Alarms. From alsune at snf.stanford.edu Tue Apr 21 01:34:07 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 21 Apr 2009 01:34:07 -0700 Subject: Problem svgcoat SNF 2009-04-21 01:34:06: Power supply Alarm Message-ID: Power supply Alarm went off during process From gsosa at snf.stanford.edu Tue Apr 21 09:49:02 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Apr 2009 09:49:02 -0700 Subject: Problem svgcoat SNF 2009-04-21 01:34:06: Power supply Alarm Message-ID: Alarm was from track #2 From jimkruger at snf.stanford.edu Wed Apr 22 17:58:39 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 22 Apr 2009 17:58:39 -0700 Subject: Problem svgcoat SNF 2009-04-22 17:58:38: alarm-track vacuum break Message-ID: will not start wafers, error = track vacuum break From bchui at snf.stanford.edu Thu Apr 23 00:14:27 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 23 Apr 2009 00:14:27 -0700 Subject: Problem svgcoat SNF 2009-04-23 00:14:26: Thick resist still has many bubbles/comets Message-ID: as many as 5 or 6 per wafer From bchui at snf.stanford.edu Thu Apr 23 00:27:14 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 23 Apr 2009 00:27:14 -0700 Subject: Comment svgcoat SNF 2009-04-23 00:27:13: Re: bubbles and comets Message-ID: Just wanted to add the observation that the bubbles not only occur near the beginning of the resist (when it might be affected by caked resist near the nozzle tip, etc) but at all stages of the dispense. So, the bubbles/comets might end up near the center of the wafer or near the edge of the wafer with equal probability. I was already cleaning the nozzle with acetone q-tip between wafers but it didn't help. I ran five of my own test wafers and there was no noticeable improvement between the first and the fifth wafers (if anything it got worse), so it's not just a matter of running enough dummies to 'purge' out the system. I also ran the same resist program (10um thick resist with 2mm EBR) 24 hours prior and there were a few bubbles but not as bad as tonight. From vilanova at snf.stanford.edu Thu Apr 23 08:22:51 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Apr 2009 08:22:51 -0700 Subject: Problem svgcoat SNF 2009-04-22 17:58:38: alarm-track vacuum break Message-ID: Empty Carbots Cleaned Catch cup Cycled Dummy wafers, ready to use, I also FOund Some Wafers In One of the YES Oven Boxes near the Coater track and some Inside Another Box Next to it, I dont know if They Belogn to someone or If they are Dummy wafers , I've saved those wafers Just in case someone comes in to claim them. From vilanova at snf.stanford.edu Thu Apr 23 09:05:13 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Apr 2009 09:05:13 -0700 Subject: Problem svgcoat SNF 2009-04-23 00:14:26: Thick resist still has many bubbles/comets Message-ID: we have re adjusted the suck back ( We noticed that the dispense was leaving an extra drop On the wafer, Cycled wafers , Uniformity looks Good ok to use.- From vilanova at snf.stanford.edu Thu Apr 23 09:05:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Apr 2009 09:05:21 -0700 Subject: Comment svgcoat SNF 2009-04-23 00:27:13: Re: bubbles and comets Message-ID: we have re adjusted the suck back ( We noticed that the dispense was leaving an extra drop On the wafer, Cycled wafers , Uniformity looks Good ok to use.- From huilingw at snf.stanford.edu Thu Apr 23 10:30:51 2009 From: huilingw at snf.stanford.edu (huilingw at snf.stanford.edu) Date: Thu, 23 Apr 2009 10:30:51 -0700 Subject: Problem svgcoat SNF 2009-04-23 10:30:50: svgcoat bake problem Message-ID: svgcoat past bake (100s) when i use program 4 on track 1. From vilanova at snf.stanford.edu Thu Apr 23 11:09:27 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Apr 2009 11:09:27 -0700 Subject: Problem svgcoat SNF 2009-04-23 10:30:50: svgcoat bake problem Message-ID: Adjusted the EBR nozzle, it was Lose and dispensing everywhere also the chuck was not sitting Flat and the wafers were woobling a little bit, Adjusted EBR nozzle and CHuck , cycled wafers Uniformity looks Good for a 15Mm resist dispense. From gsosa at snf.stanford.edu Fri Apr 24 11:14:44 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Apr 2009 11:14:44 -0700 Subject: Shutdown svgcoat SNF 2009-04-24 11:14:43: Working on recieve indexer Message-ID: From gsosa at snf.stanford.edu Fri Apr 24 12:14:01 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Apr 2009 12:14:01 -0700 Subject: Shutdown svgcoat SNF 2009-04-24 11:14:43: Working on recieve indexer Message-ID: Elevator moving real slow. Replaced the elevator motor. Tested wafer transfer and indexing. All OK.