Problem svgcoat SNF 2009-03-30 14:19:22: EBR back splash

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Apr 1 08:13:01 PDT 2009


Cleaned Catch cup and Exhaust system , Cleaned NOzzles ( dispense , EBR) Hotplates ) Cycled Wafers, Wafer Uniformity looks Great, Ok to
 use




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