Problem svgcoat SNF 2009-03-30 14:08:16: 3612 too much dispense

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Apr 1 09:09:58 PDT 2009


Adjusted dispense volume from 8 to 4ml. Adjusted pump speed for timing with sweep of dispense arm to ensure coverage to center of wafer. Checked 1.0 and 1.6 micron thickness- All OK
 1.0 micron target: Measured- Mean 10274 Angstroms, Std Dev: 6 A
 
  1.6 micron target: Measured- Mean 17113 Angstroms, Std Dev: 10 A




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