Comment svgcoat SNF 2009-04-08 17:33:07: Marks/junk on wafer backside

ginel at snf.stanford.edu ginel at snf.stanford.edu
Wed Apr 8 17:33:08 PDT 2009


The coater left marks and contamination on the wafer backside that needed to be cleaned by hand prior to ASML processing.




More information about the svgcoat-pcs mailing list