Problem svgcoat SNF 2009-04-23 00:14:26: Thick resist still has many bubbles/comets
bchui at snf.stanford.edu
bchui at snf.stanford.edu
Thu Apr 23 00:14:27 PDT 2009
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Problem svgcoat SNF 2009-04-22 17:58:38: alarm-track vacuum break
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Problem svgcoat SNF 2009-04-23 00:14:26: Thick resist still has many bubbles/comets
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as many as 5 or 6 per wafer
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Problem svgcoat SNF 2009-04-22 17:58:38: alarm-track vacuum break
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Problem svgcoat SNF 2009-04-23 00:14:26: Thick resist still has many bubbles/comets
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