Problem svgcoat SNF 2009-04-23 00:14:26: Thick resist still has many bubbles/comets

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 23 09:05:13 PDT 2009


we have re adjusted the  suck back ( We  noticed that the dispense was leaving an extra drop On the wafer, Cycled wafers , Uniformity looks
 Good ok to use.-




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