Problem svgcoat SNF 2009-04-23 00:14:26: Thick resist still has many bubbles/comets
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Apr 23 09:05:13 PDT 2009
we have re adjusted the suck back ( We noticed that the dispense was leaving an extra drop On the wafer, Cycled wafers , Uniformity looks
Good ok to use.-
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