Problem svgcoat SNF 2009-04-23 10:30:50: svgcoat bake problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 23 11:09:27 PDT 2009


Adjusted the EBR nozzle, it was Lose and dispensing everywhere
also the chuck was not  sitting Flat and the wafers were woobling a
little bit, Adjusted EBR nozzle and CHuck , cycled wafers
Uniformity looks Good for a 15Mm resist dispense. 




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