From rshyam at snf.stanford.edu Sun Aug 2 01:57:56 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 2 Aug 2009 01:57:56 -0700 Subject: Problem svgcoat SNF 2009-08-02 01:57:55: track is not working in auto mode Message-ID: using it in manual mode From rshyam at snf.stanford.edu Sun Aug 2 02:26:32 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 2 Aug 2009 02:26:32 -0700 Subject: Comment svgcoat SNF 2009-08-02 02:26:31: track 1 drain interlock was on Message-ID: just noticed that track 1 drain interlock alarm was on, so it didnt work in auto. i cleared it. its fine now. From vilanova at snf.stanford.edu Mon Aug 3 06:59:19 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Aug 2009 06:59:19 -0700 Subject: Problem svgcoat SNF 2009-08-02 01:57:55: track is not working in auto mode Message-ID: User Emptied The Secondary Container, Ok now. From vilanova at snf.stanford.edu Mon Aug 3 06:59:27 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Aug 2009 06:59:27 -0700 Subject: Comment svgcoat SNF 2009-08-02 02:26:31: track 1 drain interlock was on Message-ID: cleared. From cfchiang at snf.stanford.edu Thu Aug 6 18:39:05 2009 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Thu, 6 Aug 2009 18:39:05 -0700 Subject: Comment svgcoat SNF 2009-08-06 18:39:04: 15um 2mm EBR No Bake Message-ID: the recipe of "15um wo/vp 2mm EBR No Bake" removes 5mm edge photoresist instead of 2mm From cfchiang at snf.stanford.edu Thu Aug 6 20:49:50 2009 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Thu, 6 Aug 2009 20:49:50 -0700 Subject: Problem svgcoat SNF 2009-08-06 20:49:50: EBR Message-ID: Followed by the previous message - It was not a problem with the software/recipe. The water tube to strip edge photoresist is off. From vilanova at snf.stanford.edu Fri Aug 7 07:36:24 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Aug 2009 07:36:24 -0700 Subject: Problem svgcoat SNF 2009-08-06 20:49:50: EBR Message-ID: Adjusted EBR Nozzle, Cycled wafers , Back to normal EBR setting Ok to use , From vilanova at snf.stanford.edu Fri Aug 7 07:36:34 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Aug 2009 07:36:34 -0700 Subject: Comment svgcoat SNF 2009-08-06 18:39:04: 15um 2mm EBR No Bake Message-ID: Cleared. From grahamab at snf.stanford.edu Sun Aug 9 11:33:37 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 9 Aug 2009 11:33:37 -0700 Subject: Problem svgcoat SNF 2009-08-09 11:33:37: wafer stopping before coater Message-ID: tried resetting track using the computer, but wafer kept stopping just before coater. From vilanova at snf.stanford.edu Mon Aug 10 07:36:16 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Aug 2009 07:36:16 -0700 Subject: Problem svgcoat SNF 2009-08-09 11:33:37: wafer stopping before coater Message-ID: It was either NOt enable or someone had it Under Manual MOde, Cycled wafers, Ok to use. From chienyuc at snf.stanford.edu Thu Aug 13 19:31:06 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 13 Aug 2009 19:31:06 -0700 Subject: Problem svgcoat SNF 2009-08-13 19:31:05: Sender belt didn't move Message-ID: Tried reopen the program but the sender went down and stopped. From xzhuan1 at snf.stanford.edu Thu Aug 13 19:59:25 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 13 Aug 2009 19:59:25 -0700 Subject: Problem svgcoat SNF 2009-08-13 19:59:24: wafer stops after coating Message-ID: won't move to hot plate. need fix. From gsosa at snf.stanford.edu Fri Aug 14 08:42:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Aug 2009 08:42:00 -0700 Subject: Shutdown svgcoat SNF 2009-08-14 08:41:59: Wafer transfer problem Message-ID: Carriage rails and lifters not working. Found broken wire at fuseholder on bake plate module. Need to repair wire connections. From gsosa at snf.stanford.edu Fri Aug 14 11:05:58 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Aug 2009 11:05:58 -0700 Subject: Problem svgcoat SNF 2009-08-13 19:31:05: Sender belt didn't move Message-ID: Found broken wires on inline fuse for bake module carriage. Repositioned fuse holder to take stress off of fuse holder leads when carriage is lifted up for servicing. Tested system operation- All OK. Refilled EBR cannisters for both tracks. From gsosa at snf.stanford.edu Fri Aug 14 11:06:06 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Aug 2009 11:06:06 -0700 Subject: Problem svgcoat SNF 2009-08-13 19:59:24: wafer stops after coating Message-ID: Found broken wires on inline fuse for bake module carriage. Repositioned fuse holder to take stress off of fuse holder leads when carriage is lifted up for servicing. Tested system operation- All OK. Refilled EBR cannisters for both tracks. From gsosa at snf.stanford.edu Fri Aug 14 11:06:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Aug 2009 11:06:13 -0700 Subject: Shutdown svgcoat SNF 2009-08-14 08:41:59: Wafer transfer problem Message-ID: Found broken wires on inline fuse for bake module carriage. Repositioned fuse holder to take stress off of fuse holder leads when carriage is lifted up for servicing. Tested system operation- All OK. Refilled EBR cannisters for both tracks. From jimkruger at snf.stanford.edu Fri Aug 14 17:31:29 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 14 Aug 2009 17:31:29 -0700 Subject: Problem svgcoat SNF 2009-08-14 17:31:28: Sender on track 1 not working in spite of reset Message-ID: From nppatil at snf.stanford.edu Sun Aug 16 14:32:49 2009 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Sun, 16 Aug 2009 14:32:49 -0700 Subject: Problem svgcoat SNF 2009-08-16 14:32:48: Hot Plate Dirty Message-ID: From vilanova at snf.stanford.edu Mon Aug 17 07:45:30 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Aug 2009 07:45:30 -0700 Subject: Problem svgcoat SNF 2009-08-14 17:31:28: Sender on track 1 not working in spite of reset Message-ID: sender cassette working FIne, I think the drain system wasnt Empty thats why the system didnt want to start. Ok to use now. From vilanova at snf.stanford.edu Mon Aug 17 07:45:36 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Aug 2009 07:45:36 -0700 Subject: Problem svgcoat SNF 2009-08-16 14:32:48: Hot Plate Dirty Message-ID: cleaned. From narii at snf.stanford.edu Sat Aug 22 00:15:26 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 22 Aug 2009 00:15:26 -0700 Subject: Problem svgcoat SNF 2009-08-22 00:15:25: Grinding noise Message-ID: The spinner makse grinding noise & is malfunctioning From dgunning at snf.stanford.edu Sat Aug 22 06:13:37 2009 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Sat, 22 Aug 2009 06:13:37 -0700 Subject: Problem svgcoat SNF 2009-08-22 06:13:36: not spinning Message-ID: chuck not spinning but resist still dispenses - causes a big mess if wafer then moves on to hotplate. From vilanova at snf.stanford.edu Sat Aug 22 15:53:51 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 22 Aug 2009 15:53:51 -0700 Subject: Shutdown svgcoat SNF 2009-08-22 15:53:50: Shutdown Message-ID: I was checking Coral and I noticed that the chuck is not working but still dispenses resist , before it gets worse I will shut it down. From vilanova at snf.stanford.edu Mon Aug 24 14:17:42 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Aug 2009 14:17:42 -0700 Subject: Shutdown svgcoat SNF 2009-08-22 15:53:50: Shutdown Message-ID: replaced broken Coupling and set screws cleaned Hotplate ,exhaust system belts,catch cup , calibrated Spindle And Hotplate,ALso cleaned Secondary Container. From vilanova at snf.stanford.edu Mon Aug 24 14:17:48 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Aug 2009 14:17:48 -0700 Subject: Problem svgcoat SNF 2009-08-22 00:15:25: Grinding noise Message-ID: replaced broken Coupling and set screws cleaned Hotplate ,exhaust system belts,catch cup , calibrated Spindle And Hotplate,ALso cleaned Secondary Container. From vilanova at snf.stanford.edu Mon Aug 24 14:17:54 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Aug 2009 14:17:54 -0700 Subject: Problem svgcoat SNF 2009-08-22 06:13:36: not spinning Message-ID: replaced broken Coupling and set screws cleaned Hotplate ,exhaust system belts,catch cup , calibrated Spindle And Hotplate,ALso cleaned Secondary Container. From vilanova at snf.stanford.edu Mon Aug 24 14:18:03 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Aug 2009 14:18:03 -0700 Subject: Comment svgcoat SNF 2009-07-29 08:03:50: CLEANED CATCH CUP BELTS HOTPLATE Message-ID: replaced broken Coupling and set screws cleaned Hotplate ,exhaust system belts,catch cup , calibrated Spindle And Hotplate,ALso cleaned Secondary Container. From bchui at snf.stanford.edu Wed Aug 26 18:22:30 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:22:30 -0700 Subject: Shutdown svgcoat SNF 2009-08-26 18:22:29: Coat station totally dead Message-ID: Alarm beeps; nothing else happens. From gsosa at snf.stanford.edu Thu Aug 27 08:19:54 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 08:19:54 -0700 Subject: Shutdown svgcoat SNF 2009-08-26 18:22:29: Coat station totally dead Message-ID: Tested track operation with standard program and exercised track with maintenance transfer program. All working OK. From bchui at snf.stanford.edu Mon Aug 31 01:16:56 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 31 Aug 2009 01:16:56 -0700 Subject: Problem svgcoat SNF 2009-08-31 01:16:56: 220-7 dispense spotty Message-ID: Every two or three wafers, the nozzle would completely skip dispensing but the nozzle arm and chuck would still go through its motions (and so does the oven). I spun 10 wafers and 7 came out 'normal' and 3 didn't have any resist at all! (used 10um recipe) From vilanova at snf.stanford.edu Mon Aug 31 08:43:04 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 31 Aug 2009 08:43:04 -0700 Subject: Problem svgcoat SNF 2009-08-31 01:16:56: 220-7 dispense spotty Message-ID: re-initialized Pump, checked pump settings, Cycled Wafers ( 10 each) Dispensing working Fine , Uniformity Looks Good, Emptied Waste Secondary container ,Cleaned Belts , catch cup , hotplate. Ready to use.