Problem svgcoat SNF 2009-08-31 01:16:56: 220-7 dispense spotty

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Aug 31 01:16:56 PDT 2009


Every two or three wafers, the nozzle would completely skip dispensing but the nozzle arm and chuck would still go through its motions (and so does the oven).  I spun 10 wafers and 7 came out 'normal' and 3 didn't have any resist at all!  (used 10um recipe)




More information about the svgcoat-pcs mailing list