Problem svgcoat SNF 2009-08-31 01:16:56: 220-7 dispense spotty

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 31 08:43:04 PDT 2009


re-initialized Pump, checked pump settings, Cycled Wafers ( 10 each)
Dispensing working Fine , Uniformity Looks Good, Emptied Waste Secondary container ,Cleaned Belts , catch cup , hotplate. Ready to use. 




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