From smitmegh at snf.stanford.edu Tue Dec 1 12:09:52 2009 From: smitmegh at snf.stanford.edu (smitmegh at snf.stanford.edu) Date: Tue, 1 Dec 2009 12:09:52 -0800 Subject: Problem svgcoat SNF 2009-12-01 12:09:51: Track 1: 3612 drips Message-ID: Shipley 3612 nbozzle drips during edge bead removal resulting in very poor and non-uniform coating. I would suggest using track 2 until this problem is resolved. From vilanova at snf.stanford.edu Wed Dec 2 07:48:10 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 Dec 2009 07:48:10 -0800 Subject: Problem svgcoat SNF 2009-12-01 12:09:51: Track 1: 3612 drips Message-ID: Found Bubbles In the Dispense Line, Ran Dummies and cleaned dispense hose , Uniformity Looks Good , ready to use. From chienyuc at snf.stanford.edu Wed Dec 2 16:25:22 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Wed, 2 Dec 2009 16:25:22 -0800 Subject: Problem svgcoat SNF 2009-12-02 16:25:22: EBR not completely clear Message-ID: Coat with 1um 3612, 2mm EBR but at part of edges still have PR consistently over 12 wafers. From slcheng at snf.stanford.edu Wed Dec 2 22:25:47 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 2 Dec 2009 22:25:47 -0800 Subject: Problem svgcoat SNF 2009-12-02 22:25:47: EBR process failed Message-ID: During the EBR process, acetone will spray on to the center of the wafer and distroy the PR. From jwpchen at snf.stanford.edu Thu Dec 3 08:55:55 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 3 Dec 2009 08:55:55 -0800 Subject: Problem svgcoat SNF 2009-12-03 08:55:55: again suckback problem Message-ID: using prog7 1um, drips even on first wafer after nozzle clean From gsosa at snf.stanford.edu Thu Dec 3 09:50:42 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Dec 2009 09:50:42 -0800 Subject: Problem svgcoat SNF 2009-12-03 09:50:41: Do Not Use 3612 programs Message-ID: Having problems with 3612 dispense. Very inconsistent. Need to work on it further. Do not use any 3612 resist programs From gsosa at snf.stanford.edu Thu Dec 3 14:54:34 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Dec 2009 14:54:34 -0800 Subject: Problem svgcoat SNF 2009-12-03 09:50:41: Do Not Use 3612 programs Message-ID: Found an air leak from solinoid valve to air operated suckback valve causing inconsistent dispense and suckback control. Replaced fitting and airline. purged pump, adjusted suckback. Tested pump. All looks OK. Checked and adjusted EBR width. From gsosa at snf.stanford.edu Thu Dec 3 14:54:48 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Dec 2009 14:54:48 -0800 Subject: Problem svgcoat SNF 2009-12-03 08:55:55: again suckback problem Message-ID: Found an air leak from solinoid valve to air operated suckback valve causing inconsistent dispense and suckback control. Replaced fitting and airline. purged pump, adjusted suckback. Tested pump. All looks OK. Checked and adjusted EBR width. From gsosa at snf.stanford.edu Thu Dec 3 14:54:55 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Dec 2009 14:54:55 -0800 Subject: Problem svgcoat SNF 2009-12-02 22:25:47: EBR process failed Message-ID: Found an air leak from solinoid valve to air operated suckback valve causing inconsistent dispense and suckback control. Replaced fitting and airline. purged pump, adjusted suckback. Tested pump. All looks OK. Checked and adjusted EBR width. From gsosa at snf.stanford.edu Thu Dec 3 14:55:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Dec 2009 14:55:00 -0800 Subject: Problem svgcoat SNF 2009-12-02 16:25:22: EBR not completely clear Message-ID: Found an air leak from solinoid valve to air operated suckback valve causing inconsistent dispense and suckback control. Replaced fitting and airline. purged pump, adjusted suckback. Tested pump. All looks OK. Checked and adjusted EBR width. From emyers at snf.stanford.edu Wed Dec 9 09:17:24 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Dec 2009 09:17:24 -0800 Subject: Shutdown svgcoat SNF 2009-12-09 09:17:23: Hot Plate failure Message-ID: I can not get the belts on the hot plate module to run. From vilanova at snf.stanford.edu Wed Dec 9 09:44:02 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Dec 2009 09:44:02 -0800 Subject: Shutdown svgcoat SNF 2009-12-09 09:17:23: Hot Plate failure Message-ID: reintialized track and tested Hotplate manual and auto mode track working Fine , Ok to use . From ofidaner at snf.stanford.edu Fri Dec 11 07:50:30 2009 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 11 Dec 2009 07:50:30 -0800 Subject: Problem svgcoat SNF 2009-12-11 07:50:30: 220-7 alarm Message-ID: 220-7 bottle needs replacement. From vilanova at snf.stanford.edu Fri Dec 11 09:17:35 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Dec 2009 09:17:35 -0800 Subject: Problem svgcoat SNF 2009-12-11 07:50:30: 220-7 alarm Message-ID: replaced bottle Purged line , Cleaned Catch cup and Belts, hotplate , Empty Resist Residue Secondary ContainerCycled wafers, Ok to use From vilanova at snf.stanford.edu Fri Dec 11 09:17:46 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Dec 2009 09:17:46 -0800 Subject: Comment svgcoat SNF 2009-10-27 10:47:38: poor coverage recipe 2 Message-ID: replaced bottle Purged line , Cleaned Catch cup and Belts, hotplate , Empty Resist Residue Secondary ContainerCycled wafers, Ok to use